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AI-based model measures atomic defects in materials
In biology, defects are generally bad. But in materials science, defects can be intentionally tuned to give materials useful ...
A new model measures defects that can be leveraged to improve materials' mechanical strength, heat transfer, and ...
Defects in graphene 1 not only modify its properties 2,3,4,5,6,7,8,9,10,11 but also extend its functionality by providing sites for chemical reactions, which enables intentional doping at specific ...
Several equipment makers are developing or ramping up a new class of wafer inspection systems that address the challenges in finding defects in advanced chips. At each node, the feature sizes of the ...
Advanced Defect Inspection Techniques For nFET And pFET Defectivity At 7nm Gate Poly Removal Process
During 7nm gate poly removal process, polysilicon is removed exposing both NFET and PFET fins in preparation for high-k gate oxide. If the polysilicon etch is too aggressive or the source and drain ...
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