LayTec: integrated in-situ metrology for thin-film and semiconductor manufacturing. Improve yield, process control, device performance for epitaxy, etch and PV.

EpiTT measures wafer temperature, multi-wavelength reflectance in real time for information on growth rate, film thickness of thin films during epitaxial growth

Company LayTec develops and manufactures metrology-based solutions that enable high yield and high performance manufacturing, advanced process control and related R&D. LayTec’s integrated …

LayTec’s product portfolio covers all areas of thin film and semiconductor process monitoring and control and offers all required solutions from one source.

EpiX ® mapping stations provide fast, non-contact 2D measurement of critical optical wafer properties. By combining white light reflectance, photoluminescence and wafer bow mapping in one platform, …

AbsoluT AbsoluT provides a precise simulated temperature for on-site temperature calibration of LayTec's EpiTT and EpiCurve ® TT.

Jul 10, 2024 · Many thanks to our colleagues for ensuring that the tool arrives safely at our customer! The EpiX ® C2C tool is a cassette-to-cassette white light reflectance and photoluminescence …

EpiCurve® TT for Combining wafer curvature measurements with emissivity-corrected pyrometry, growth rate/thickness measurements by three-wavelength reflectance.

Metrology for MOCVD Processes - Latest Progress Thomas Zettler1, Frank Brunner2, Arne Knauer2, Andre Maaßdorf2, Markus Weyers2, Benjamin Buick1, Claudine Groß1, Christian Kaspari1, Thomas …

MOCVD of InGaAsP/InP and InGaAlAs/InP based device structures: full replacement of ex-situ process calibration by advanced in-situ metrology A.J. SpringThorpe, O.J. Pitts, O. Salehzadeh Einabad,